Thermo Scientific* Theta 300 is a wafer-handling tool that uses a combination of X-ray photoelectron spectroscopy (XPS) and angle resolved XPS to characterize surfaces and ultra-thin films with high precision.
Many of the new materials that are now appearing in semiconductor devices are chemically complex and are present as ultra-thin films. For this type of material, it is essential that the composition of the film is known with confidence along with the way in which the composition varies close to surfaces and interfaces. Theta 300 provides this information from wafers of up to 300mm diameter by making use of parallel angle resolved XPS (PARXPS). The Avantage data system, which is integral to Theta 300, provides all of the advanced software to deal with the ARXPS data and produce accurate and precise measurements.