Avantage Data System

• Based upon the Windows* operating system
• Easy to network and allows remote access and control of the instrument

Data Acquisition

Avantage controls all aspects of data acquisition, where appropriate, these include:

• Sample alignment
• The spectrometer and its associated lenses and detector
• Monochromatic and non-monochromatic X-ray sources
• Field emission electron gun
• Ion gun
• Flood gun

Sample Alignment

• For XPS, the image from the system microscope can be displayed on the desktop
• The positions for analysis can be selected from the image
• Markers can be placed on the live optical image to select the position for analysis
• The optical image is stored for inclusion in a report.
• For Auger, an SEM image is used in place of the optical image for sample alignment

Data Acquisition Using The Experiment Tree

• All of the experimental parameters can be controlled, in any combination, in a single experiment using the concept of the experiment “tree”
• The various parts of an experiment are defined as “objects” on the tree
• As the experiment continues, the instructions contained within each object are performed
• If there is a branch at any given object the instructions contained within the branch are performed before moving on to the next object at the same level in the hierarchy
• Tree structure is similar to that of the directory in Windows Explorer
• Sections of the Experiment Tree can be copied and pasted or imported from other experiments, in the same way that files or folders are moved within Windows Explorer
• Tree can accommodate multiple samples and multiple experiment types along with processing and reporting steps
• Experiment Tree can be stored and recalled, providing a recipe for a given type of analysis

Data Processing

• Being an integrated system, Avantage data processing can be performed on a data set as it is being acquired
• For traceability, all processing steps that change the data are recorded in an audit trail
• Avantage is unique in its ability to deal with angle resolved XPS data

Avantage contains a large suite of data processing tools, including:

• Advanced tool for peak identification and chemical state assessment
• Quantification which can be automatic or by making use of the analyst's input
• Fast and convenient peak fitting at every level of multi-level data sets (e.g. profiles and spectrum images)
• Non-linear least squares fitting coupled with target factor and principal component analysis for the treatment of large data sets
• Construction of quantified depth profiles
• Generation of spectra from areas of an image
• Image processing tools

The software contains comprehensive processing tools, including:

• The Relative Depth Plot which allow the ordering of ultra-thin layers to be determined
• A thickness calculator for each layer in a stack of ultra-thin layers
• Generation of a non-destructive depth profile from ARXPS data
• Thickness maps for ultra-thin films

Calibration and Alignment

• Routines are available within Avantage to calibrate and align XPS instruments, where appropriate
• A calibration history log is maintained ensuring full traceability