Thermo Scientific Theta Probe is a small spot XPS instrument which has the unique ability to collect angle resolved spectra without the need to tilt the sample, providing the capability to characterize ultra-thin layers non-destructively.
New and emerging technologies rely on the engineering of the near-surface region of a solid surface. Such technologies include biomedical devices, surface modified polymers and materials within advanced semiconductor devices. For this type of material, it is essential that the composition of the first few nanometers is known with confidence. Theta Probe is a unique XPS spectrometer that provides this information by making use of parallel angle resolved XPS (PARXPS). Contained within the Avantage data system is all of the advanced software to deal with the ARXPS data and produce accurate and precise answers.